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数字微镜器件超分辨成像光学系统装调误差影响研究

邢思远 王超 徐淼 李英超 史浩东 刘壮 付强

邢思远, 王超, 徐淼, 李英超, 史浩东, 刘壮, 付强. 数字微镜器件超分辨成像光学系统装调误差影响研究[J]. 中国光学, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220
引用本文: 邢思远, 王超, 徐淼, 李英超, 史浩东, 刘壮, 付强. 数字微镜器件超分辨成像光学系统装调误差影响研究[J]. 中国光学, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220
XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220
Citation: XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220

数字微镜器件超分辨成像光学系统装调误差影响研究

doi: 10.37188/CO.2020-0220
基金项目: 国家自然科学基金(No. 61805028,No. 61805027,No. 61705019,No. 61701045);装发2020年第二批快速扶持项目(No. 61404140517);科工局专项(No. KJSP2016010202);国家自然基金天文联合基金(No. U1731240);吉林省自然科学基金(No. 20180101338JC);应用光学国家重点实验室开放基金(No. SKLA02020001A11)
详细信息
    作者简介:

    邢思远(1997—),男,辽宁铁岭人,硕士研究生,2019年于长春理工大学获得学士学位,主要从事光学设计、计算光学等方面的研究。Email:1249824042@qq.com

    李英超(1966—),男,吉林长春人,工学博士,教授,博士生导师,中国宇航协会光电技术专委会常务委员,主要从事多维度光学特性测试与探测技术,先进光学成像测试技术。Email:hsjlyc@126.com

  • 中图分类号: O436

Influence of alignment error on DMD super-resolution imaging optical system

Funds: Supported by National Natural Science Foundation of China(No. 61805028, No. 61805027, No. 61705019, No. 61701045); The Second Batch of Rapid Support Projects in 2020(No. 61404140517); Special Project of Science and Industry Bureau(No. KJSP2016010202); Joint Astronomical Fund of National Natural Science Foundation of China(No. U1731240); Natural Science Foundation of Jilin Province(No. 20180101338JC); Open Fund of State Key Laboratory of Applied Optics(No. SKLA02020001A11)
More Information
  • 摘要: 目前对于超分辨成像技术的研究主要集中在超分辨重建算法方面,光学系统本身的装调误差对超分辨成像结果的影响尚未见报道。针对这一问题,开展了装调误差对超分辨成像影响的研究,建立了基于数字微镜器件(DMD)的超分辨成像光学系统的基本成像模型,设计了一个工作波段为8~12 μm的DMD超分辨成像光学系统,提出了装调误差对超分辨成像质量影响的分析方法。在成像模型中分别引入适当的偏心、倾斜、镜片间隔误差、离焦等装调误差,对超分辨重建结果进行仿真分析,得出了该超分辨成像光学系统装调时的公差范围:该系统在加工装调时X方向总体偏心误差控制在±0.07 mm以内,Y方向总体偏心误差控制在±0.05 mm以内,X方向和Y方向的总体倾斜误差控制在±0.06°以内,总体镜片间隔误差控制在±0.02 mm以内,成像物镜的离焦量控制在±0.04 mm以内,投影物镜的离焦量控制在±0.05 mm以内,在此范围内超分辨成像光学系统可以保证超分辨成像的质量。
  • 图  1  仿真流程图

    Figure  1.  Simulation flow chart

    图  2  视场设置

    Figure  2.  Field of view settings

    图  3  (a)原图和(b)OMP重构图像

    Figure  3.  (a) Original image and (b) OMP reconstructed image

    图  4  光学系统总体构成

    Figure  4.  Overall structure of the optical system

    图  5  光学系统结构图

    Figure  5.  Structural diagram of optical system

    图  6  光学系统的传递函数

    Figure  6.  Transfer function of the optical system

    图  7  镜片偏心量与重建图像PSNR值的关系

    Figure  7.  Relationship between lens eccentricity and PSNR value of reconstructed image

    图  8  镜片倾斜量与重建图像PSNR值的关系

    Figure  8.  Relationship between lens tilt and PSNR of reconstructed images

    图  9  镜片间隔误差与重建图像PSNR值的关系

    Figure  9.  Relationship between lens spacing error and the PSNR of reconstructed images

    图  10  光学系统离焦与重建图像PSNR值之间的关系

    Figure  10.  Relationship between defocus of the optical system and PSNR value of the reconstructed image

    表  1  光学系统参数

    Table  1.   Performance parameters of the optical system

    ParameterValue
    Wavelength/μm8~12
    Field of view FOV(X/Y)/(°)0~4.4/0~3.52
    F number1.76
    DMD array size1920 pixel×1080 pixel
    DMD pixel size/μm10.8
    Detector pixel size/μm17
    Detector array size640 pixel×512 pixel
    Dynamic range of detector/dB29
    下载: 导出CSV

    表  2  公差分配结果

    Table  2.   Tolerance allocation results

    偏心/mm倾斜/(°)镜片间隔
    误差/mm
    成像物镜
    离焦/mm
    投影物镜
    离焦/mm
    XYXY
    0.070.050.060.060.020.040.05
    下载: 导出CSV
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出版历程
  • 收稿日期:  2020-12-28
  • 修回日期:  2021-01-14
  • 网络出版日期:  2021-05-08
  • 刊出日期:  2021-09-18

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