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基于粒子群算法离轴多反光学系统设计

吴越 王丽萍 于杰 张旭 金春水

吴越, 王丽萍, 于杰, 张旭, 金春水. 基于粒子群算法离轴多反光学系统设计[J]. 中国光学. doi: 10.37188/CO.2021-0087
引用本文: 吴越, 王丽萍, 于杰, 张旭, 金春水. 基于粒子群算法离轴多反光学系统设计[J]. 中国光学. doi: 10.37188/CO.2021-0087
WU Yue, WANG Li-ping, YU Jie, ZHANG Xu, JIN Chun-shui. Design of off-axis multi-reflective optical system based on particle swarm optimization[J]. Chinese Optics. doi: 10.37188/CO.2021-0087
Citation: WU Yue, WANG Li-ping, YU Jie, ZHANG Xu, JIN Chun-shui. Design of off-axis multi-reflective optical system based on particle swarm optimization[J]. Chinese Optics. doi: 10.37188/CO.2021-0087

基于粒子群算法离轴多反光学系统设计

doi: 10.37188/CO.2021-0087
基金项目: 国家科技重大专项(No. 2018ZX02102002)
详细信息
    作者简介:

    吴 越(1993—),男,湖北黄冈人,博士研究生,2015年于东北师范大学获得学士学位,主要从事光学设计方面的研究。E-mail:wy2398236580 @163.com

    金春水(1964—),男,吉林长春人,博士,研究员,博士生导师,2003年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事紫外-极紫外成像光学、紫外-极紫外光学薄膜技术及超高精度光学检测方面的研究。E-mail:jincs@sklao.ac.cn

Design of off-axis multi-reflective optical system based on particle swarm optimization

Funds: Supported by National Science and Technology Major Project (No. 2018ZX02102002)
More Information
  • 摘要: 满足像差平衡和多约束控制的初始结构构建,是实现极小像差离轴多反光学系统设计的关键。本文基于空间光线追迹与像差矫正相结合的分组设计方法建立离轴多反的初始结构计算的数学模型,提出了一种改进的粒子群算法解决离轴多反光学系统的初始结构问题,采用带收缩因子的自然选择的粒子群算法提高了计算精度,提升了设计效率,获取离轴多反光学系统的初始结构。最后,本文以离轴六反的极紫外光刻投影物镜为例,验证了此方法的可靠性和有效性,实现了0.33NA极紫外光刻物镜综合波像差优于$1/80\lambda $RMS光学系统设计。
  • 图  1  离轴六反光学系统结构示意图

    Figure  1.  Schematic of the off-axis six-reflection optical system.

    图  2  Group 1结构示意图

    Figure  2.  Schematic diagram of the configuration of Group 1

    图  3  Group 2示意图

    Figure  3.  Schematic diagram of the configuration for Group 2

    图  4  6组学习因子四种不同算法计算的评价函数的收敛曲线图

    Figure  4.  Convergence curves of evaluation functions calculated by four different algorithms for 6 groups of learning factors

    图  5  算法流程图

    Figure  5.  Flow chart for the algorithm.

    图  6  离轴六反光学系统初始结构示意图

    Figure  6.  Schematic diagrams of initial structure for the off-axis six-reflection optical system.

    图  7  极小像差离轴六反光学系统优化后结构示意图

    Figure  7.  Schematic diagram of the optimized structure for the off-axis six-reflective optical system

    图  8  离轴六反光学系统全视场图

    Figure  8.  Distortion of full image field for the off-axis six-reflection optical system.

    图  9  离轴六反光学系统全视场畸变分布示意图波像差分布示意图

    Figure  9.  Wavefront error RMS on full image for the off-axis six-reflection optical system.

    表  1  6组学习因子四种不同算法计算的评价函数值

    Table  1.   Values of evaluation functions calculated by four different algorithmsfor 6 groups of learning factors

    带收缩因子的自然选择的
    PSO算法
    带收缩因子的模拟退火
    PSO算法
    带收缩因子的杂交的
    PSO算法
    带惯性权重的自然选择的
    PSO算法
    c1=2.05,c2=2.050.01060.09850.09020.2415
    c1=2.2,c2=1.90.01740.11480.08830.0289
    c1=2.3,c2=1.80.00450.03730.04980.0297
    c1=2.4,c2=1.70.02550.06440.04720.0584
    c1=2.5,c2=1.60.01260.05330.01510.0407
    c1=2.6,c2=1.70.09340.12120.10410.1092
    下载: 导出CSV

    表  2  离轴六反光学系统设计主要参数指标

    Table  2.   Specifications of the off-axis six-reflection optical system.

    Parameter Performance
    Wavelength(nm) 13.5
    Numerical Aperture 0.33
    Field of View(mm×mm) 26×2 Arc
    Reduction Ratio 4
    Wavefront Error RMS(λ) 0.011
    Chief Ray Angle on Mask(°) 6
    Max Distortion(nm) 1.04
    Max Image Telecentricity(mrad) 1.75
    Total Track(mm) 1371
    Max Asphere Departure(μm) 60
    下载: 导出CSV
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  • 网络出版日期:  2021-06-22

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