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绿光波段60 pm超窄带滤光片的研制

王凯旋 陈刚 刘定权 马冲 张秋玉

王凯旋, 陈刚, 刘定权, 马冲, 张秋玉. 绿光波段60 pm超窄带滤光片的研制[J]. 中国光学. doi: 10.37188/CO.2021-0092
引用本文: 王凯旋, 陈刚, 刘定权, 马冲, 张秋玉. 绿光波段60 pm超窄带滤光片的研制[J]. 中国光学. doi: 10.37188/CO.2021-0092
WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J]. Chinese Optics. doi: 10.37188/CO.2021-0092
Citation: WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J]. Chinese Optics. doi: 10.37188/CO.2021-0092

绿光波段60 pm超窄带滤光片的研制

doi: 10.37188/CO.2021-0092
基金项目: 上海市自然科学基金(No. 17ZR1434900)
详细信息
  • 中图分类号: O484

Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band

Funds: Supported by Natural Science Foundation of Shanghai Municipality, China (No. 17ZR1434900)
  • 摘要: 波长为532 nm的绿色激光在大气层中有较强的穿透能力,可用于自由空间光通信和激光三维测绘方面,为了抑制背景光的干扰,需要半功率带宽小于100 pm的光谱滤波器。为此,设计并研制了基于光学干涉薄膜的超窄带滤光片。五氧化二钽(Ta2O5)和二氧化硅(SiO2)分别作为高低折射率膜层材料,熔石英为基片,采用了双离子束溅射沉积方法制备了设计的光学薄膜。用可调谐激光器和功率计测量了滤光片的透射光谱,其半功率带宽为60±2 pm,透过率达到62.6%。
  • 图  1  设计的超窄带滤光片透射光谱

    Figure  1.  Transmittance curve of the designed ultra-narrow band-pass filter

    图  2  双离子束溅射沉积系统示意图[15]

    Figure  2.  Schematic diagram of the dual ion beam sputtering system (DIBS)[15]

    图  3  透射光控信号随膜层的变化

    Figure  3.  Variation of the transmittance of optical signal as a function of film layer

    图  4  各个膜层误差对光谱影响的敏感度

    Figure  4.  Optical thickness error of each layer to the spectral sensitivity

    图  5  分成两片监控后光控信号的变化

    Figure  5.  Optical monitoring signal of the two separated monitor glass plates

    图  6  透射光谱测量装置示意图

    Figure  6.  Schematic diagram of the transmitted spectrum measuring equipment

    图  7  测量的滤光片透射光谱

    Figure  7.  Measured transmittance curve of the ultra-narrow band-pass filter

    图  8  随机引入控制误差后的光谱曲线变化情况

    Figure  8.  Variation of spectral curves after randomly introducing the control errors

    图  9  粗糙基片表面与薄膜分界示意图

    Figure  9.  Schematic diagram of the rough boundary of substrate and thin film

    表  1  可见光波段的主要亚纳米光谱滤波技术比较

    Table  1.   Comparison of several filtering techniques for sub nanometer spectrum in visible light band

    光谱滤波技术光谱精细度光学效率波长选择结构稳定性
    声光调制1~0.01 nm中等可快速调制复杂较好
    原子滤波1~0.001 nm高--低固定,选择少复杂一般
    F-P标准具1~0.002 nm固定,选择多较复杂较好
    薄膜干涉1~0.03 nm固定,选择多简洁
    下载: 导出CSV

    表  2  测量和设计的透射光谱数据

    Table  2.   Date of measured and designed transmission curves

    带宽(pm)峰值透过率(%)中心波长(nm)
    A设计值(无吸收)5793.4532.00
    B设计值(有吸收)6374.3532.00
    C测量值6262.6532.009
    D偏离值(与B比)?1?11.7+0.009
    下载: 导出CSV

    表  3  基片和薄膜的光学和热特性[12, 21, 22]

    Table  3.   Optical and thermal properties of substrates and thin films in this research[12, 21, 22]

    材料Materials折射率
    n
    @ 532 nm,

    20~40 ℃
    折射率温度系数
    dn/dT(ppm/℃)
    线膨胀系数
    α(ppm/℃)

    @0~100 ℃
    石英晶体(CQ)1.555.213.4
    熔融石英
    (JGS-1)
    1.4610.00.55
    微晶玻璃
    (Zerodur)
    1.5414.30.05
    玻璃(K9,BK7) 1.52 3.0 7.4
    蓝宝石(Al2O3 1.77 13.1 6.7
    SiO2薄膜 1.44 9.0 0.55
    Ta2O5薄膜 2.11 20.0 1.1
    下载: 导出CSV
    ag币游app_币游娱乐官网(官网推荐)
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  • 网络出版日期:  2021-08-11

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