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同步辐射用36单元压电变形镜研制及其面形调控研究

袁德波 许亮 张文斌 周志勇 董晓浩 刘正坤 张国斌

袁德波, 许亮, 张文斌, 周志勇, 董晓浩, 刘正坤, 张国斌. 同步辐射用36单元压电变形镜研制及其面形调控研究[J]. 中国光学. doi: 10.37188/CO.2021-0103
引用本文: 袁德波, 许亮, 张文斌, 周志勇, 董晓浩, 刘正坤, 张国斌. 同步辐射用36单元压电变形镜研制及其面形调控研究[J]. 中国光学. doi: 10.37188/CO.2021-0103
YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics. doi: 10.37188/CO.2021-0103
Citation: YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics. doi: 10.37188/CO.2021-0103

同步辐射用36单元压电变形镜研制及其面形调控研究

doi: 10.37188/CO.2021-0103
基金项目: 国家重点研发计划(No. 2016YFA0401004)
详细信息
    作者简介:

    袁德波(1996—),男,安徽六安人,中国科学技术大学国家同步辐射实验室硕士研究生,2019年于南京理工大学获得学士学位,主要从事压电变形镜方面的研究。E-mail:yuandebo@mail.ustc.edu.cn

    张国斌(1967—),男,博士,研究员,博士生导师,1990年、2001年于中国科学技术大学分别获得学士、博士学位,主要从事氧化物量子功能材料制备与物性、同步辐射光学工程、X射线自适应光学的研究。E-mail:gbzhang@ustc.edu.cn

  • 中图分类号: TN384; O434

Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability

  • 摘要: 第四代同步辐射光源及自由电子激光装置中束线光学系统对光学元件性能提出了苛刻的要求。使用压电变形镜是实现超高面形精度调控和实施波前补偿的有效途径,也是目前亟需突破的国产化技术瓶颈。针对这一问题,研制了长度200 mm、含36单元压电促动器的压电变形镜。通过数值模拟优化了变形镜结构参数,利用国产工艺完成了变形镜样机的制作,并对其面形调控能力进行初步探究。测试结果表明:所研制变形镜样机的平面面形误差可降低至1.38 nm rms,斜率误差降低至240 nradrms,实现了平面面形的纳米级调控。
  • 图  1  双压电片变形镜示意图

    Figure  1.  Schematic model of bimorph mirror

    图  2  促动能力(红)、PZT表面弯曲(黑)对反射镜面形的影响与PZT厚度关系

    Figure  2.  Relationship between PZT thickness and actuation capacity(red)and influence of surface fluctuation of PZT’s bend(black)on mirror shape

    图  3  装配好的压电片变形镜

    Figure  3.  Final bimorph mirror

    图  4  100 V电压下的响应曲线

    Figure  4.  The response curve for 100 V

    图  5  反射镜封装与校正前后面形

    Figure  5.  Mirror surface at different stages

    图  6  斜率误差曲线

    Figure  6.  Slope error curve

    表  1  变形镜材料参数

    Table  1.   Bimorph mirror material parameter

    参数SiPZT
    大小mm3200×55×10200×17.5×d (仿真需要设置的参数)
    密度[kg/m3]23297500
    泊松比0.280.34
    杨氏模量[MPa]17000063000
    下载: 导出CSV

    表  2  变形镜重复性

    Table  2.   Repeatability of bimorph mirror

    时间/天01234
    PV/nm3.753.923.444.033.68
    RMS/nm1.381.531.211.651.51
    下载: 导出CSV
    ag币游app_币游娱乐官网(官网推荐)
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  • 网络出版日期:  2021-07-02

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